SEM Models


TESCAN VEGA




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Key features

TESCAN VEGA’s 4th generation Scanning Electron Microscope (SEM) with tungsten filament electron source combines SEM imaging and live elemental composition analysis in a single window of TESCAN’s Essence™ software. This combination significantly simplifies acquisition of both morphological and elemental data from the sample, making VEGA SEM an efficient analytical solution for routine materials inspection in quality control, failure analysis and research labs.


  • Analytical platform featuring fully integrated TESCAN Essence™ EDS, which efficiently combines SEM imaging with elemental composition analysis in a single Essence™ software window.
  • Unique four-lens Wide Field Optics™design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation
  • Effortless and precise SEM navigation on the sample at magnifications as low as 2× without the need for an additional optical navigation camera due to the unique Wide Field Optics™ design.
  • The proprietary Intermediate Lens (IML) that works as an "Aperture Changer" makes the exchange of the effective final aperture in an electromagnetic way
  • Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
  • The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
  • SingleVac™ mode as a standard feature for observing charging and beam-sensitive samples.
  • Superior specimen handling using a fully motorized compucentric stage
  • SE, 4Q BSE and optional Essence™ EDS available for topographic, material contrast and elemental analysis
  • Featured with Essence™ software with all standard features
  • Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and rotary fore vacuum pump
  • Fully automated microscope set-up including electron optics set-up and alignment
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Modular analytical platform which can be optionally equipped with the widest selection of fully integrated detectors (e.g. CL, Water cooled BSE or RAMAN spectrometer).