High brightness Schottky emitter for high-resolution/high current/low-noise imaging
Unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML) offering a variety of working and displaying modes, for enhanced field of view or depth of focus, etc.
Real-time In-Flight Beam Tracing™ for performance and beam optimization, which also allows direct and continuous control of the beam and beam current
Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages
Excellent imaging at short working distances with the powerful In-Beam detector (optional)
All MIRA3 chambers provide superior specimen handling using a 5-axis fully motorized compucentric stage and have ideal geometry for EDX and EBSD
Optional extra-large chambers (XM, GM) with robust stages able to accommodate large samples including large wafers (6", 8", 12") are also available
Numerous interface ports with optimized analytical geometry for attaching EDX, WDX and EBSD detectors and many others
Investigation of non-conductive samples in variable pressure modes
Several options for chamber suspension type ensure effective reduction of ambient vibrations in the laboratory
Non-distorted EBSD pattern
TESCAN CLARA
SiC particles
Interlamellar spacing in perlite of cast iron
Ti Nanotubes
Key features
New BrightBeam™SEM column technology for uncompromised UHR
New BrightBeam™ SEM column with proprietary 70° combined electrostatic-magnetic objective lens for maximum universality.
Field-free ultra-high resolution imaging for maximum versatility in imaging and analysis including the investigation of magnetic samples.
New detection system including In-Beam Axial detector and Multidetector for angle-selective and energy-selective electron signal collection gives complete control on surface sensitivity and the option to explore with different contrast.
New Field Emission Schottky electron gun now enabling electron beam currentsup to 400 nA and rapid beam energy changes.
Extended electron beam energy range down to 50 eV without relying on sample bias beam deceleration.
New generation of electronics with up to 8live signal channels simultaneously.
EquiPower™ lens technology for efficient thermal power dissipation and excellent electron column stability.
Beam Deceleration Technology (BDT) for further improved resolution at low and ultra-low electron beam energies with simultaneous detection of SE and BSE signals. (optional)
New Essence™software platform and streamlined GUI with application-specific customizable layout, workflow-oriented wizards, 3D collision model, quick search box, SEM undo-redo, innovated report template editor, image processing, multi-user environment localized in many languages.