Ga FIB Models
TESCAN SOLARIS
TESCAN SOLARIS
Key features
Key features
An alternative solution for semi-automated high-quality TEM lamella preparation
An alternative solution for semi-automated high-quality TEM lamella preparation
- Low-kV ultra-high-resolution imaging of high-end semiconductor devices
- Precise end-pointing at low electron beam energies
- Gentle FIB thinning for improved quality results in TEM sample preparation enabled by excellent low-kV ion beam performance
- Optimized workflows and recipes for easy preparation of ultra-thin TEM lamellae
- Semi-automated software module for site-specific TEM lamella preparation
- Preparation of advanced geometry TEM lamellae from the most advanced semiconductor nodes
- Specialized, load-lock-compatible stage carousel for TEM sample preparation
- Dedicated TEM grid holders with fully optimized geometry for advanced TEM sample preparation
- World-class quality in sample preparation with excellent performance at low energies for preparing damage-free ultra-thin TEM specimens.
TESCAN AMBER
TESCAN AMBER
Key features
Key features
Versatile nanoanalytical FIB-SEM to expand your materials research capabilities
Versatile nanoanalytical FIB-SEM to expand your materials research capabilities
- High precision micro sample preparation
- Ultra-high resolution field-free SEM imaging and nanoanalysis
- Extended field of view and easy navigation
- Multi-site process automation
- Multi-modal FIB-SEM tomography
- Easy-to-use modular software user interface
- Attractive optional packages for various applications
TESCAN LYRA 3
TESCAN LYRA 3
Key features
Key features
High Performance Electron Optics
High Performance Electron Optics
- Unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML) offering a variety of working and displaying modes, for instance with enhanced field of view or depth of focus, etc.
- Real time In-Flight Beam Tracing™ for performance and beam optimization, integrated with the well-established software Electron Optical Design. It also includes a direct and continuous control of the beam spot size and beam current.
- Fully automated electron optics set-up and alignment
- Fast imaging rate
- A unique live stereoscopic imaging using the advanced 3D Beam Technology which opens up the micro and nano-world for an amazing 3D experience and 3D navigation.
High Performance Ion Optics
High Performance Ion Optics
- Sophisticated high performance CANION FIB system for fast and precise cross-sectioning and TEM sample preparation.
- Optional ultra-high resolution COBRA-FIB column represents the highest level of technology in terms of resolution both for imaging and milling. This is one of the most precise FIB instruments for nano-engineering in the world.
