Ga FIB Models


Key features

An alternative solution for semi-automated high-quality TEM lamella preparation

  • Low-kV ultra-high-resolution imaging of high-end semiconductor devices
  • Precise end-pointing at low electron beam energies
  • Gentle FIB thinning for improved quality results in TEM sample preparation enabled by excellent low-kV ion beam performance
  • Optimized workflows and recipes for easy preparation of ultra-thin TEM lamellae
  • Semi-automated software module for site-specific TEM lamella preparation
  • Preparation of advanced geometry TEM lamellae from the most advanced semiconductor nodes
  • Specialized, load-lock-compatible stage carousel for TEM sample preparation
  • Dedicated TEM grid holders with fully optimized geometry for advanced TEM sample preparation
  • World-class quality in sample preparation with excellent performance at low energies for preparing damage-free ultra-thin TEM specimens.


Key features

Versatile nanoanalytical FIB-SEM to expand your materials research capabilities

  • High precision micro sample preparation
  • Ultra-high resolution field-free SEM imaging and nanoanalysis
  • Extended field of view and easy navigation
  • Multi-site process automation
  • Multi-modal FIB-SEM tomography
  • Easy-to-use modular software user interface
  • Attractive optional packages for various applications


Key features

High Performance Electron Optics

  • Unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML) offering a variety of working and displaying modes, for instance with enhanced field of view or depth of focus, etc.
  • Real time In-Flight Beam Tracing™ for performance and beam optimization, integrated with the well-established software Electron Optical Design. It also includes a direct and continuous control of the beam spot size and beam current.
  • Fully automated electron optics set-up and alignment
  • Fast imaging rate
  • A unique live stereoscopic imaging using the advanced 3D Beam Technology which opens up the micro and nano-world for an amazing 3D experience and 3D navigation.

High Performance Ion Optics

  • Sophisticated high performance CANION FIB system for fast and precise cross-sectioning and TEM sample preparation.
  • Optional ultra-high resolution COBRA-FIB column represents the highest level of technology in terms of resolution both for imaging and milling. This is one of the most precise FIB instruments for nano-engineering in the world.